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Tantalum
Pentoxide Evaporation Material
Density---
8.7 g/cm3
Purity--- 99.95%,99.99%, Dark grey /white tablets or granules
Melting point --- 1880 ℃, Vacuum
pressure at 2000℃ 1 Pa, at 2200℃ 10 Pa
Properties of thin film---
Transmission range 400 ~ 8000 nm
Refractive index at 550nm 2.10
Hints on evaporation---
Electron-beam gun.
Evaporation temperature 2000 ℃
Oxygen partial pressure 2-5
x 10-5 Torr
Substrate temperature
175 - 300 ℃
Evaporation Rate 2-5 Å/sec
Source Container tantalum or graphite liner
Shape--- Irregular
pieces, pellet, 8-9 mm dia. x 4-5 mm thick
sintered tablets,3-12 mm
sintered pieces
Dimension---3-8mm
irregular pieces
Application---Anti-reflection
coatings, interference filters, UV
laser applications with silicon dioxide (n = 1.48), Hard,
scratch-resistant and adherent coatings, dielectrics in film capacitors,
as gate insulators in large scale integrated circuits requiring low leakage
voltage characteristics. |