Sputtering targets,metal sputtering targets,alloy sputtering targets,ceramic sputtering targets,compound sputtering targets, PVD coating material - CRM

Sputtering Targets

Metal sputtering target - Alloy sputtering target - Ceramic sputtering target

Sputtering Target - Target Application

China rare metal material co.,ltd (CRM) is an experter in supplying sputtering targets. CRM can offers a full line of sputtering targets with various components from industrial grade to super high purity. Mostly targets are manufacture by programs. Also CRM can manufacture targets that are less and rare frequently used compositions. Also CRM can offer some addition server include substrade, bonding, backing plate. China rare metal material co.,ltd  insisted  on improving  our fabrication techniques for supply more values and better products.

Good news: CRM developed a full series of ceramic sputtering targets for DC sputter!!! Ta2OX,Nb2OX,TiOx,ZrOx,CdS...

Sputter Coating Application: Sputter coating thin film primary be used field include decorate thin film, construction glass, automobile widow, low radiation glass, plane display, optical communication/ optics field, light date store field, thin film solar cell, magnetism date store field. ( Details )

Sputtering targets fabrication methods:
CRM have lots of fabrication methods, and we will select the best ways to manufacture products base on raw materials speciafication. Some available methods show as below: Vacuum Induction Melting (VIM), Vacuum induced levitation melting furnace Vacuum Sintering, Vacuum Melting Casting, Vacuum Arc Melting, Hot Pressing (HP), Hot Isostatic Pressing (HIP), Cold Isostatic Pressing(CIP), cold pressing and sinter, FZ, CZ, CVD...... Now our plasma spray technique is studying and improving, we will can offer some samples.

Backing Plates and Bonding Service: Backing plates include OFHC copper, Aluminum, Titanium, Stainless steel or Molybdenum. The dimension will base on your drawing and you design. silicon target bonding
Bonding Service
º Back metallisation up to 1600 x 1000mm
º Metallic and non-metallic bond coverage >98%
º Ultrasonic c-scan on bond integrity

Sputtering Targets Shape and Size: Discs, Rectangle, Step, Plates, Sheets, Tube, Foils, Rods, Taper, Ring, S-Guns, Custom-Made.
Disk targets, column targets, step wafer targets (Dia<350mm, Thickness >1mm )
Rectangle Targets, Slice Targets, Step Rectangle Targets (Longth <1500mm, Witdh<300mm, Thickness>1mm)
Tube Target / Rotation sputtering Target (Outer Dia < 300mm, Thickness > 2mm)

Sputtering Targets list (By Application) :

Semiconductor Correlative targets / Thin film of electrode and wire layout : aluminium target, copper target,gold target,silver?target, palladium target, platinum target,alumium silicom target,aluminium silicom copper alloy target and so on.

Thin film of packet eletrode: Molybdenum targets,tungsten targets,titanium targets?and so on;

Thin film of conglutinate: Tungsten target, titanium targets and so on.
Thin insulating film:PbTiZrO3 targets and so on.

Hard disk with a magnetic thin film magnetic recording: CoCrTa alloy targets, CoCrPt alloy targets,CoCrTaPt alloy target...

Magnetic head of thin film: CoTaCr alloy targets,CoCrZr alloy target ...

Tificial crystal film: CoPt alloy target,CoPd alloy targets ...

Phase change optical disk recording films: TeSe target,SbSe target,GeSbTe targets,GeTe alloy targets ...

Magneto-optical recording films for disk: TbDyCo allohy targets,TbDyFe targets,Al2Oe targets,MgO targets,SiN targets...

CD reflective film: Aluminium targets,AlTi alloy targets, AlCr targets,Gold targets,Gold alloy targets...

CD Protection Film: SiN targets,SiO2 targets,ZnS targets ...

Transparent conductive film for flat display: ITO target,AZO targets,silicon dioxide target,titanium target,chromium targets...

Display wiring film electrode: Molybdenum targets, tungsten target,Titanium target, tantalum targets, Chromium target,aluminium targets,aluminum titanium alloy targets,AlTa alloy targets,Aluminium neodymium alloy target,AlNd alloy targets...

Display Thin Film electroluminescent: ZnS doped Mn targets, ZnS doped Tb targets, ZnS doped Eu targets, Y2O3 targets, Ta2O5 targets, BaTiO3 targets...

Decorative Film: Titanium targets, Zirconium targets, Chromium targets, TiAl targets, SS targets ...

Low resistance film: NiCr target, NiCrSi alloy targets, NiCrAl targets, NiCu alloy targets...

Superconducting thin films: YBCO targets (YBaCuO targets), BiSrCaCuO targets ...

Tools plating film: Nitride targets, Carbide targets, Boride targets, Cr target, Ti targets, TiAl alloy targets,Zr target, Graphite targets, Aluminum 99.99%, Chromium 99.5%, Nickel/Chromium 99.5%, Nickel & Alloys 99.5%, Tungsten Carbide C:0.4%, Titanium & Alloys ( TiAL, TiALY) 99.5%, Zirconium 99.5%

Thin film solar cell:Silicon sputtering targets, Gallium Arsenide (GaAs)99.999%, ITO 99.99%,Titanium metal 99.9%,Aluminum Zinc Oxide (AZO) 99.99%,Zinc Oxide (ZnO) 99.99% Silicon Dioxide ( Si02 ) 99.99%, Titanium Oxide (TiO2 ) 99.99%, Molybdenum 99.9%, Nickel / Chromium ( 80:20 )99.5%, NiV targets, Chromium target 99.5~99.9%, Cadmium Telluride (CdTe) 99.999%,Cadmium Sulfide (CdS), 99.99%, 99.999%, Platinum (Pt) 99.99%, GaSe target, GaS target, CuGa target, CuIn target, CuInGaSe (CIGS) 99.99%, CuInSe(CIS) 99.99%, ZnAl alloy sputtering target, CIG sputtering target (5N)
Sputtering Targets Materials list:
Metal sputtering targets: Aluminum (Al),Antimony (Sb), Bismuth (Bi), Boron (B), Cadmium (Cd), Cerium (Ce), Chromium (Cr), Cobalt (Co), Copper ( Cu), Dysprosium (Dy), Erbium (Er), Europium (Eu), Gadolinium (Gd), Germanium (Ge), Gold (Au), Graphite, Carbon, (C), Hafnium (Hf), Holmium (Ho), Iridium (Ir), Indium (In), Iron (Fe), lanthanum (La), Lead (Pb), Lutetium (Lu), Manganee (Mn), Molybdenum (Mo), Magnesium (Mg),Neodymium (Nd), Niobiums (Nb), Nickel (Ni), Palladium (Pd),Platinum (Pt), Praseodymium (Pr),Rhenium (Re), Ruthenium (Ru), Samarium (Sm), Scandium (Sc),Selenium (Se), Silicon (Si), Silver (Ag), Tantalum (Ta), Terbium (Tb), Tellurium (Te),Tin (Sn), Thulium (Tm), Titanium (Ti), Tungsten (W), Vanadium (V), Ytterbium (Yb), Yttrium (Y), Zirconium (Zr), Zinc (Zn)
Alloy Sputtering Targets:AlCu, AlCr, AlMg,AlNd, AlSi, AlSiCu, AlAg, AlV,CaNiCrFe, CaNiCrFeMoMn, CeGd, CeSm, CrSi, CoCr, CoCrMo, CoFe, CoFeB ,CoNi, CoNiCr, CoPt,CoNbZr,CoTaZr, CoZr, CrV, CrB, CrSi, CrCu, CuCo, CuGa, CuIn, CuNi, CoNiPt, CuZr,DyFe, DyFeCo, FeB,FeC, FeMn, GdFe, GdFeCo, HfFe, IrMn, IrRe, InSn, MoNb, MoSi, NiAl, NiCr, NiCrSi, NdDyFeCo, NiFe, NiMn, NiNbTi, NiTi, NiV, SmCo, AgCu, AgSn, TaAl, TbDyFe, TbFe, TbFeCo, TbGdFeCo, TiAl, TiNi, TiCr, WRe, WTi, WCu, ZrAl, ZrCu, ZrFe, ZrNb, ZrNi, ZrTi, ZrY, ZnAl, ZnMg
Ceramic sputtering target:
Boride Ceramic Sputtering Targets: Cr2B, CrB, CrB2, Cr5B3, FeB, HfB2 ,LaB6, Mo2B, Mo2B5 ,NbB, NbB2, TaB, TaB2, TiB2, W2B, WB, VB, VB2, ZrB2
Carbide Ceramic Sputtering Targets : B4C,Cr3C2,HfC,Mo2C,NbC,SiC,TaC, TiC, WC, W2C, VC, ZrC
Fluoride Ceramic Sputtering Targets : AlF3, BaF3, CdF2, CaF2, CeF3, DyF3, ErF3, HfF4, KF, LaF3, PbF2, LiF, PrF3, MgF2, NdF3, ReF3, SmF3, NaF, Cryolite, Na3AlF6 , SrF2, ThF4, YF3, YbF3
Nitrides Ceramic Sputtering Targets :AlN, BN, GaN, HfN, NbN, Si3N4, TaN, TiN, VN, ZrN
Oxide Ceramic Sputtering targets: Al2O3, Sb2O3, ATO ,BaTiO3, Bi2O3, CeO2, CuO, Cr2O3 ,Dy2O3 ,Er2O3, Eu2O3, Gd2O3, Ga2O3, GeO2, HfO2, Ho2O3, In2O3, ITO, Fe2O3, Fe3O4, La2O3, PbTiO3, PbZrO3, LiNbO3, Lu3Fe5O12, Lu2O3, MgO, MoO3, Nd2O3, Pr6O11, Pr(TiO2)2, Pr2O3, Sm2O3, Sc2O3, SiO2, SiO, SrTiO3, SrZrO3, Ta2O5, Tb4O7, TeO2, ThO2, Tm2O3, TiO2, TiO, Ti3O5, Ti2O3, SnO2, SnO, WO3, V2O5, YAG, Y3Al5O12, Yb2O3, Y2O3, ZnO, ZnO:Al, ZrO2(unstabilized), ZrO2-5-15wt%CaO)
Selenides Ceramic Sputtering Targets: Bi2Se3, CdSe, CuSe, Ga2Se3, In2Se3, PbSe, MoSe2, NbSe2, TaSe2, WSe2, ZnSe
Silicides Ceramic Sputtering Targets: Cr3Si, CrSi2, CoSi2, HfSi2, MoSi2, NbSi2, TaSi2, Ta5Si3, TiSi2, Ti5Si3, WSi2, V3Si, VSi2, ZrSi2
Sulfides Ceramic Sputtering Targets: AgS, Ag2S, CuS, Cu2S, Sb2S3, As2S3, CdS, FeS, GaS, GeS, PbS, SnS, In2S3, MoS2, NbS1.75, TaS2, WS2, ZnS
Tellurides Ceramic Sputtering Targets:Al2Te3,Bi2Te3, CdTe, CuTe, Ga2Te3, GeTe, PbTe, MoTe2, NbTe2, TaTe2, TmTe, WTe2, ZnTe
Other: AZO, Cr-SiO, CIGS, ITO, IGZO, GaAs, Ga-P, GaSb, In-Sb, InAs, InP, InSn, LSMO, Na3AlF6 , YBCO, LCMO, YSZ

Tel: 0086-791-88101311 Fax: 0086-791-88101211 E-mail: sales@china-raremetal.com

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