Zirconium Oxide (ZrO₂) Sputtering Targets

Zirconium Dioxide (ZrO₂) Sputtering targets

Purity --- 99.95% Density---5.5g/cm3

Refractive Index---1.95~2.05/

Transparence Wave Band---- 0.25~9 um

Manufacturing Process:

Material synthesis ---> Milling ---> HP(Vacuum) ---> Machining ---> Checking ---> Packing

Speciafication (Max):

Planar circular target: Dia ≤480mm, Thickness ≥1mm

Planar Rectangle target: Length ≤420mm, Width ≤270mm, Thickness ≥1mm)

Rotary Target: Diameter≤ 200mm,  Thickness >2mm)

Avialable Size: ( in sotre )

Zirconium Disilicide sputtering target 25.4mm DiaX 3.175mm thickness

Zirconium Disilicide sputtering target 25.4mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 50.8mm DiaX 3.175mm thickness

Zirconium Disilicide sputtering target 50.8mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 76.5mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 76.5mm Dia X 6/35mm thickness

Zirconium Disilicide sputtering target 101.6mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 101.6mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 127mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 127mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 152.4mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 152.4mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 177.8mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 177.8mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 203.2mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 203.2mm Dia X 6.35mm thickness

Custom-made

Application:

Zirconium Oxide Sputtering targets (ZrOx target)

Purity --- 99.95% Density---5.5g/cm3

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Refractive Index---1.95~2.05/

Transparence Wave Band---- 0.25~9 um
Application--- DC sputter

Zirconium Oxide+Titanium Oxide(ZrO₂+TiO₂) Sputtering targets

Purity--- 99.99%

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Zirconium Oxide+Silicon Oxide(ZrO₂+SiO₂) Sputtering targets

Purity--- 99.99%

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Our Advantage about Zirconium Dioxide (ZrO₂) Sputtering targets

China rare metal material co.,limited (CRM) is an experter in manufacture Zirconium Dioxide Sputtering targets as Coating material . All Zirconium Dioxide Sputtering targets are manufacture by programs with  with the highest possible density and smallest possible average grain size.. 

CRM material co.,limited is specialized in making virous Sputtering targets . We have many raw material compounds line, such as semiconductor line, chemical compounds line, metallurgy line, powder milling line, etc. Moreover, we introduced many advanced technology and equipments from related companies at home and aborad. We also have an experienced research team who have developed many new and special pellets, and also successfully made many trial orders and received many customers satisfaction and long-term friendship. 

All Zirconium Dixoide Sputtering targets are analyzed using best detection means including chemical analysis, Crystal phase microscope, x ray diffraction(XRD), X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP).

Reference Information of Zirconium Dioxide (ZrO₂) Sputtering Targets

Zirconium dioxide (ZrO2), sometimes known as zirconia (not to be confused with zircon), is a white crystalline oxide of zirconium. Its most naturally occurring form, with a monoclinic crystalline structure, is the mineral baddeleyite. A dopant stabilized cubic structured zirconia, cubic zirconia, is synthesized in various colours for use as a gemstone and a diamond simulant.

Structure: Three phases are known: monoclinic below 1170 °C, tetragonal between 1170 °C and 2370 °C, and cubic above 2370 °C.The trend is for higher symmetry at higher temperatures, as is usually the case. A small percentage of the oxides of calcium or yttrium stabilize in the cubic phase. The very rare mineral tazheranite, (Zr,Ti,Ca)O2, is cubic. Unlike TiO2, which features six-coordinated titanium in all phases, monoclinic zirconia consists of seven-coordinated zirconium centres. This difference is attributed to the larger size of the zirconium atom relative to the titanium atom.

Chemical reactions: Zirconium dioxide is one of the most studied ceramic materials. ZrO2 adopts a monoclinic crystal structure at room temperature and transitions to tetragonal and cubic at higher temperatures. The change of volume caused by the structure transitions from tetragonal to monoclinic to cubic induces large stresses, causing it to crack upon cooling from high temperatures.[5] When the zirconia is blended with some other oxides, the tetragonal and/or cubic phases are stabilized. Effective dopants include magnesium oxide (MgO), yttrium oxide (Y2O3, yttria), calcium oxide (CaO), and cerium(III) oxide (Ce2O3).

Zirconia is often more useful in its phase 'stabilized' state. Upon heating, zirconia undergoes disruptive phase changes. By adding small percentages of yttria, these phase changes are eliminated, and the resulting material has superior thermal, mechanical, and electrical properties. In some cases, the tetragonal phase can be metastable. If sufficient quantities of the metastable tetragonal phase is present, then an applied stress, magnified by the stress concentration at a crack tip, can cause the tetragonal phase to convert to monoclinic, with the associated volume expansion. This phase transformation can then put the crack into compression, retarding its growth, and enhancing the fracture toughness. This mechanism, known as transformation toughening, significantly extends the reliability and lifetime of products made with stabilized zirconia.
The ZrO2 band gap is dependent on the phase (cubic, tetragonal, monoclinic, or amorphous) and preparation methods, with typical estimates from 5–7 eV.

A special case of zirconia is that of tetragonal zirconia polycrystal, or TZP, which is indicative of polycrystalline zirconia composed of only the metastable tetragonal phase.

Uses: The main use of zirconia is in the production of hard ceramics, such as in dentistry, with other uses including as a protective coating on particles of titanium dioxide pigments, as a refractory material, in insulation, abrasives, and enamels.

Stabilized zirconia is used in oxygen sensors and fuel cell membranes because it has the ability to allow oxygen ions to move freely through the crystal structure at high temperatures. This high ionic conductivity (and a low electronic conductivity) makes it one of the most useful electroceramics.Zirconium dioxide is also used as the solid electrolyte in electrochromic devices.

Zirconia is a precursor to the electroceramic lead zirconate titanate (PZT), which is a high-κ dielectric, which is found in myriad components.

Single crystals of the cubic phase of zirconia are commonly used as diamond simulant in jewellery. Like diamond, cubic zirconia has a cubic crystal structure and a high index of refraction.

Relation Material of Sputtering targets

Zirconium Metal - Zr

Zirconium Aluminium alloy - ZrAl

Zirconium Boride - ZrB2

Zirconium Carbide - ZrC

Zirconium Copper Alloy - ZrCu

Zirconium Disilicide - ZrSi2

Zirconium Disulfide - ZrS2

Zirconium Diselenide - ZrSe2

Zirconium Iron Alloy - ZrFe

Zirconium Nickel Alloy - ZrNi

Zirconium Niobium Alloy - ZrNb

Zirconium Nitride - ZrN

Zriconium Oxide - ZrO2

Zirconium Silicon Alloy - ZrSi

Zirconium Ytterium Alloy - ZrY