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Indium
Phosphide (InP) Wafer (Single Crystal /mul-crystal)
Diameter --- 2",
3" Purity --- 99.999%
Surface --- One
side polished, two side polished, orientation(100)(111)
thickness:350+/-25µm or 625µm.
Application --- substrate for epitaxial indium gallium arsenide based opto-electronic devices.
Below show some common product, other special requirements can be satisfied.
All wafer can be used as you got it, orientation(100)(111).
Main Parameter of Indium phosphide single crystal wafer:
| Varieties |
Diameter(mm) |
Type |
Consistency(cm-3) |
Mobility(cm2/V.s) |
Resistivity(¦¸.cm) |
Dislocation density(cm-2) |
| InP |
50 |
N |
(0.8-2)X1016 |
(3.5-4)X103 |
- |
(5-6)X104 |
| S-InP |
50 |
N |
(0.8-3)X1018
(4-8)X1018 |
(2.0-2.4)X103
(1.0-1.6)X103 |
- |
3X104
<5X102(60%Area) |
| S-InP |
76 |
N |
(0.8-3)X1018
(4-6)X1018 |
(2.0-2.4)X103
(1.0-1.6)X103 |
- |
5X104
<1X103(60%Area) |
| Zn-InP |
50 |
P |
(0.6-2)X1018
(3-6)X1018 |
70-90 50-70 |
- |
5X104
<5X102(60%Area) |
| Fe-InP |
50 |
N |
107-108 |
>=2000 |
107-108 |
<3X104 |
| Fe-InP |
76 |
N |
107-108 |
>=2000 |
107-108 |
<6X104 |
| Mul-Crystal |
50-76 |
N |
(0.6-5)X1016 |
- |
- |
- |
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