Zirconium Nitride (ZrN) sputtering targets

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Zirconium Nitride (ZrN) Sputtering Targets

Zirconium Nitride (ZrN) Sputtering targets

Purity: 99.5%

Manufacturing Process:

Material synthesis ---> Milling ---> HP(Vacuum) ---> Machining ---> Checking ---> Packing

Speciafication (Max):

Planar circular target: Dia ≤480mm, Thickness ≥1mm

Planar Rectangle target: Length ≤420mm, Width ≤270mm, Thickness ≥1mm)

Rotary Target: Diameter≤ 200mm, Thickness >2mm)

Avialable Size: ( in sotre )

Zirconium Disilicide sputtering target 25.4mm DiaX 3.175mm thickness

Zirconium Disilicide sputtering target 25.4mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 50.8mm DiaX 3.175mm thickness

Zirconium Disilicide sputtering target 50.8mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 76.5mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 76.5mm Dia X 6/35mm thickness

Zirconium Disilicide sputtering target 101.6mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 101.6mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 127mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 127mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 152.4mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 152.4mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 177.8mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 177.8mm Dia X 6.35mm thickness

Zirconium Disilicide sputtering target 203.2mm Dia X 3.175mm thickness

Zirconium Disilicide sputtering target 203.2mm Dia X 6.35mm thickness

Custom-made

Application:

Our Advantage about Zirconium Nitride (ZrN) Sputtering targets

China rare metal material co.,limited (CRM) is an experter in manufacture Zirconium Nitride ceramic sputtering targets as Coating material . All Zirconium Nitride ceramic sputtering targets are manufacture by programs with with the highest possible density and smallest possible average grain size..

CRM material co.,limited is specialized in making virous Ceramic sputtering targets. We have many raw material compounds line, such as semiconductor line, chemical compounds line, metallurgy line, powder milling line, etc. Moreover, we introduced many advanced technology and equipments from related companies at home and aborad. We also have an experienced research team who have developed many new and special pellets, and also successfully made many trial orders and received many customers satisfaction and long-term friendship.

All Zirconium Nitride ceramic sputtering targets are analyzed using best detection means including chemical analysis, Crystal phase microscope, x ray diffraction(XRD), X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP).

ZrN structure

Reference Information of Zirconium Nitride (ZrN) Sputtering targets

Zirconium nitride (ZrN) is an inorganic compound used in a variety of ways due to its properties.
ZrN grown by physical vapor deposition (PVD) is a light gold color similar to elemental gold. ZrN has a room-temperature electrical resistivity of 12.0 µΩ·cm, a temperature coefficient of resistivity of 5.6·10−8 Ω·cm/K, a superconducting transition temperature of 10.4 K, and a relaxed lattice parameter of 0.4575 nm. The hardness of single-crystal ZrN is 22.7±1.7 GPa and elastic modulus is 450 GPa.

Zirconium nitride is a hard ceramic material similar to titanium nitride and is a cement-like refractory material. Thus it is used in refractories, cermets and laboratory crucibles. When applied using the physical vapor deposition coating process it is commonly used for coating medical devices, industrial parts (notably drill bits), automotive and aerospace components and other parts subject to high wear and corrosive environments.

Also zirconium nitride was suggested as a hydrogen peroxide fuel tank liner for rockets and aircraft.

Name: Zirconium nitride,Zirconium(III) nitride, Nitridozirconium
CAS Number:25658-42-8

ChemSpider:85159
ECHA InfoCard:100.042.864
EC Number:247-166-2
PubChem CID:94359
Chemical formula:ZrN
Appearance:Yellow-brown crystals
Odor:Odorless
Density:7.09 g/cm3 (24 °C)
Melting point:2,952 °C (5,346 °F; 3,225 K) at 760 mmHg

Solubility in water:Insoluble
Solubility:Soluble in concentrated HF, acids[1]Crystal structure:Cubic, cF8
Space group:Fm3m, No. 225
Lattice constant: a = 4.5675 Å[2],α = 90°, β = 90°, γ = 90°
Coordination geometry Octahedral[2]
Thermochemistry Specific heat capacity (C):40.442 J/mol·K
Std molar entropy (So298):38.83 J/mol·K
Std enthalpy of formation (ΔfHo298):−365.26 kJ/mol

Relation Products of Zirconium Nitride (ZrN) Sputtering targets

Zirconium Metal - Zr

Zirconium Aluminium alloy - ZrAl

Zirconium Boride - ZrB2

Zirconium Carbide - ZrC

Zirconium Copper Alloy - ZrCu

Zirconium Disilicide - ZrSi2

Zirconium Disulfide - ZrS2

Zirconium Diselenide - ZrSe2

Zirconium Iron Alloy - ZrFe

Zirconium Nickel Alloy - ZrNi

Zirconium Niobium Alloy - ZrNb

Zirconium Nitride - ZrN

Zriconium Oxide - ZrO2

Zirconium Silicon Alloy - ZrSi

Zirconium Ytterium Alloy - ZrY