Zirconium Oxide (ZrO2)

Zirconium Dioxide (ZrO2) Sputtering targets

Purity--- 99.9%,99.95%,99.99% Density---5.5g/cm3

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Refractive Index---1.95~2.05/

Transparence Wave Band---- 0.25~9 um

Zirconium Oxide Sputtering targets (ZrOx target)

Purity--- 99.9%,99.95%,99.99% Density---5.5g/cm3

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Refractive Index---1.95~2.05/

Transparence Wave Band---- 0.25~9 um
Application--- DC sputter

Zirconium Oxide+Titanium Oxide(ZrO2+TiO2) Sputtering targets

Purity--- 99.99%

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Zirconium Oxide+Silicon Oxide(ZrO2+SiO2) Sputtering targets

Purity--- 99.99%

Shape--- Discs, Plate, Step (Dia ≤200mm,, Thickness ≥1mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤200mm, Thickness ≥1mm)

Tube( Diameter< 300mm, Thickness >2mm )

Zirconium Oxide (ZrO2) Evaporation Material 

Density--- 5.6 g/cm3 Purity---99.99%

Solubility---Insoluble in water, soluble in sulfuric acid,and hydrofluoric acid.

Melting point---2700 ℃ Boiling point--- 4800 ℃,Vapour pressure at 2400℃ 1 Pa,at 2600℃ 10 Pa
Linear expansion coefficient ---5.72×10-5K (at 60℃,monoclinic)
Specs heat capacity---(at 20℃) 0.453 KJ/KgK
Hardness--- (acc. to Mohs) 6.5
Properties of thin film
Transmission range 250 ～ 7000nm
Refractive Index substrate temperature 250℃ at 550nm 2.05 ～ 2.1
Substrate temperature 30℃ at 550nm 1.8 ～ 1.9
Hints on evaporation
Evaporation with electron-beam gun or W boat
Evaporation temperature 2500～ 2700 ℃
Evaporation pressures ～ 5×10-3 to 2×10-2Pa
Rate of condensation 10nm/min
Substrate temperature ～ 200 ～ 300 ℃
Shape---solid substance, White / dark grey tablets or granular

Specification--- custom-made

Applications--- Multi-layer coatings, beam-splitter, anti-reflection coatings and decoration coatings etc. 

Application --- 
(1) Functional ceramics, ceramic pigment, high-purity pigment, enamel.
(2) High temperature optical element, oxygen-sensitive element, high-capacity capacitor, optical storage, image display element, light modulated element, light shutter, stereotelevision glasses, image storage and display element.
(3) Abrasive material, insulating material, fire-retarding material, roentgenograply.
(4) High-temperature and corrosion resisting components, bearing nozzle, smelting crucible.
(5) Piezoelectric element, ion exchanger, solid dielectric, filter, temperature and pressure transmitters and transmitting elements, electrode used for magnetic-current generator, heating element.
(6) Jewellery: artificial jewel.
(7) Fuel, battery.