Catalog specimen reference · actual appearance and dimensions depend on your specification
Lithium phosphate (Li3PO4) target for LiPON deposition
Formula: Li3PO4 · SKU: CRM-SPEC-LIPON · CAS: Not listed
CRM fabricates advanced Lithium Phosphate (Li3PO4) Target for LiPON Deposition via solid-state reaction synthesis, spray drying, cold isostatic pressing (CIP), and high-temperature sintering up to 2200 °C. Engineered for phase purity (verified by XRD), controlled stoichiometry, and high sintered density, our ceramic and oxide materials are available in 99.5% purity as Sputtering Targets (Custom geometries & dimensions on request).
Confirming your specification
Share the impurity limits, dimensional tolerances, backing plate configuration, and analytical reports required for your process. We will confirm the available specification, lead time, and lot documentation with your quotation.
Selected options are carried over to your inquiry list. Choose your quantity and unit above, then specify target dimensions, tolerances, or backing plate preferences on the inquiry page. Mechanical drawings can be sent by email.
Documentation & engineering support
Certificate of Analysis (COA)Request →Safety Data Sheet (SDS)Request →Custom specificationsRequest → Open stoichiometry & target mass calculators Calculators →Material specifications
| Chemical formula | Li3PO4 |
|---|---|
| Product code | CRM-SPEC-LIPON · CAS Not listed |
| Product type | Sputtering targets |
| Material family | Oxides & technical ceramics |
| Elements | Li ↗ P ↗ O ↗ |
| Purity grades | 99.5% |
|---|---|
| Listed forms | Sputtering targets (custom geometries & dimensions on request) |
| Reference starter spec | Quote on Request (RFQ) · Standard Ø50.8 mm ceramic target / 100 g powder lot |
| Application guidance | Piezoelectric, ferroelectric, multiferroic & dielectric thin-film devices; Solid-state lithium/oxide electrolyte membranes (LLZO, LLTO, GDC, YSZ); High-temperature structural ceramics, wear-resistant coatings & thermal insulators; Functional oxide electronics, gas sensors & electrochromic glazing |
For multi-element alloys and compounds, please specify whether composition ratios are in atomic percent (at%) or weight percent (wt%).